CPC Subgroup Additional Only
H01J 2237/30 Electron or ion beam tubes for processing objects
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Electron or ion beam tubes for processing objects
4 direct subcodes
Child Classifications
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- H01J 2237/303 Electron or ion optical systems
- H01J 2237/304 Controlling tubes
- H01J 2237/31 Processing objects on a macro-scale
- H01J 2237/317 Processing objects on a microscale