CPC Subgroup Additional Only
H01J 2237/31701 Ion implantation
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Electron or ion beam tubes for processing objects > Processing objects on a microscale > Ion implantation
3 direct subcodes
Child Classifications
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- H01J 2237/31703 Dosimetry
- H01J 2237/31705 Impurity or contaminant control
- H01J 2237/31706 characterised by the area treated