CPC Subgroup Additional Only
H01J 2237/317 Processing objects on a microscale
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Electron or ion beam tubes for processing objects > Processing objects on a microscale
6 direct subcodes
Child Classifications
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- H01J 2237/31701 Ion implantation
- H01J 2237/31732 Depositing thin layers on selected microareas
- H01J 2237/31735 Direct-write microstructures
- H01J 2237/3174 Etching microareas
- H01J 2237/31749 Focused ion beam
- H01J 2237/3175 Lithography