CPC Subgroup Additional Only
H01J 2237/3174 Etching microareas
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Electron or ion beam tubes for processing objects > Processing objects on a microscale > Etching microareas
3 direct subcodes
Child Classifications
Navigate with arrow keys, Enter to open
- H01J 2237/31742 for repairing masks
- H01J 2237/31745 for preparing specimen to be viewed in microscopes or analyzed in microanalysers
- H01J 2237/31747 using STM