CPC Subgroup Additional Only
H01J 2237/33 characterised by the type of processing
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Processing objects by plasma generation > characterised by the type of processing
6 direct subcodes
Child Classifications
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- H01J 2237/332 Coating
- H01J 2237/334 Etching
- H01J 2237/335 Cleaning
- H01J 2237/336 Changing physical properties of treated surfaces
- H01J 2237/338 Changing chemical properties of treated surfaces
- H01J 2237/339 Synthesising components