CPC Subgroup Additional Only
H01J 2237/332 Coating
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Processing objects by plasma generation > characterised by the type of processing > Coating
2 direct subcodes
Child Classifications
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- H01J 2237/3321 CVD [Chemical Vapor Deposition]
- H01J 2237/3322 Problems associated with coating