CPC Subgroup Additional Only
H01J 2237/3322 Problems associated with coating
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Processing objects by plasma generation > characterised by the type of processing > Coating > Problems associated with coating
5 direct subcodes
Child Classifications
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- H01J 2237/3323 uniformity
- H01J 2237/3325 large area
- H01J 2237/3326 high speed
- H01J 2237/3327 Coating high aspect ratio workpieces
- H01J 2237/3328 adhesion, stress, lift-off of deposited films
Top Applicants
Top 10 applicants by patent filingsfor class H01, 2013–2023, worldwide · Source: EPO PATSTAT
- SAMSUNG ELECTRONICS COMPANY KR 37,897
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY TW 36,116
- APPLIED MATERIALS US 21,640
- LG ENERGY SOLUTION KR 20,770
- LG CHEM KR 19,835
- TOKYO ELECTRON JP 18,519
- ROBERT BOSCH DE 14,595
- INTEL CORPORATION US 13,580
- MURATA MANUFACTURING COMPANY JP 12,151
- SAMSUNG SDI COMPANY KR 12,080