CPC Subgroup
H01J 37/02 Details
Full Title
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (H01J33/00, H01J40/00, H01J41/00, H01J47/00, H01J49/00 take precedence) > Details
11 direct subcodes
Child Classifications
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- H01J 37/04 Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J 37/16 Vessels; Containers
- H01J 37/18 Vacuum locks
- H01J 37/20 Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
- H01J 37/21 Means for adjusting the focus
- H01J 37/22 Optical or photographic arrangements associated with the tube
- H01J 37/24 Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
- H01J 37/244 Detectors; Associated components or circuits therefor
- H01J 37/248 Components associated with high voltage supply