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PCE
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CPC Subgroup
H01J 37/21

Means for adjusting the focus

Full Title

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (H01J33/00, H01J40/00, H01J41/00, H01J47/00, H01J49/00 take precedence) > Details > Means for adjusting the focus