CPC Subgroup
H01J 37/28 with scanning beams
Full Title
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (H01J33/00, H01J40/00, H01J41/00, H01J47/00, H01J49/00 take precedence) > Electron or ion microscopes; Electron or ion diffraction tubes > with scanning beams