CPC Subgroup
H10P 32/1408 Full Title
Diffusion of dopants within, into or out of wafers, substrates or parts of devices (during formation of materials H10P14/00) > Diffusion of dopants within, into or out of semiconductor bodies or layers > within a single semiconductor body or layer in a solid phase; between different semiconductor bodies or layers, both in a solid phase
2 direct subcodes
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