DIFF Subgroup
C23C 14/35 by application of a magnetic field, e.g. magnetron sputtering
Introduced: January 1990
Full Title
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material > characterised by the process of coating > Sputtering > by application of a magnetic field, e.g. magnetron sputtering
Of 3 combined children, 0 exist in both systems.
3 codes are CPC-only extensions.
Child Classifications
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