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PCE
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DIFF Subgroup
C23C 14/46

by ion beam produced by an external ion source

Introduced: January 1985

Full Title

Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material > characterised by the process of coating > Sputtering > by ion beam produced by an external ion source

No child classifications to compare. This is a leaf node in both IPC and CPC.