DIFF Subgroup
C30B 31/10 Reaction chambers; Selection of materials therefor
Introduced: January 1980
Full Title
Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor > by contacting with diffusion material in the gaseous state > Reaction chambers; Selection of materials therefor
Of 2 combined children, 0 exist in both systems.
2 codes are CPC-only extensions.
Child Classifications
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