by contacting with diffusion material in the gaseous state

Introduced: January 1980

Full Title

Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor > by contacting with diffusion material in the gaseous state

IPC and CPC are identically structured here. All 6 subcodes exist in both systems.

IPC defines codes here since 1980.

Child Classifications

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C30B 31/08 the diffusion materials being a compound of the elements to be diffused since 1980 IPC+CPC Available in IPC and CPC
C30B 31/10 Reaction chambers; Selection of materials therefor since 1980 +2 CPC IPC+CPC Available in IPC and CPC
C30B 31/12 Heating of the reaction chamber since 1980 IPC+CPC Available in IPC and CPC
C30B 31/14 Substrate holders or susceptors since 1980 IPC+CPC Available in IPC and CPC
C30B 31/16 Feed and outlet means for the gases; Modifying the flow of the gases since 1980 +1 CPC IPC+CPC Available in IPC and CPC
C30B 31/18 Controlling or regulating since 1980 +1 CPC IPC+CPC Available in IPC and CPC