DIFF Subgroup
C30B 31/22 by ion-implantation
Introduced: January 1980
Full Title
Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor > Doping by irradiation with electromagnetic waves or by particle radiation > by ion-implantation
No child classifications to compare. This is a leaf node in both IPC and CPC.