G03F 7/213 Exposing with the same light pattern different positions of the same surface at the same time
Introduced: January 1985
Full Title
Full titles differ between systems:
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor > Exposure; Apparatus therefor > Exposing with the same light pattern different positions of the same surface at the same time
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (using photoresist structures for special production processes, see the relevant places, e.g. B44C, H10P76/00, H05K) > Exposure; Apparatus therefor (photographic printing apparatus for making copies G03B27/00) > Exposing with the same light pattern different positions of the same surface at the same time
No child classifications to compare. This is a leaf node in both IPC and CPC.