DIFF Subgroup
G03F 7/23 Automatic means therefor
Introduced: January 1985
Full Title
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor > Exposure; Apparatus therefor > Exposing sequentially with the same light pattern different positions of the same surface > Automatic means therefor