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PCE
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DIFF Subgroup Additional Only
H01J 2237/04

Means for controlling the discharge

Full Title

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Means for controlling the discharge

Of 5 combined children, 0 exist in both systems.

5 codes are CPC-only extensions.

Note: 5 CPC extensions are marked as secondary classification only.