DIFF Subgroup Additional Only
H01J 2237/04926 combined
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Means for controlling the discharge > Focusing means > Lens systems > combined
H01J 2237/04926 Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Means for controlling the discharge > Focusing means > Lens systems > combined