Tilting or rocking beam around an axis substantially at an angle to optical axis

Full Title

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Means for deflecting or directing discharge > Tilting or rocking beam around an axis substantially at an angle to optical axis

Of 1 combined children, 0 exist in both systems.

1 codes are CPC-only extensions.

Note: 1 CPC extensions are marked as secondary classification only.

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