Tilting or rocking beam around an axis substantially at an angle to optical axis

Full Title

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Means for deflecting or directing discharge > Tilting or rocking beam around an axis substantially at an angle to optical axis

Child Classifications

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• H01J 2237/1507 dynamically, e.g. to obtain same impinging angle on whole area