MICROSTRUCTURAL TECHNOLOGY

Description

B81 covers the design, manufacture, and manipulation of structures and devices at microscopic and submicroscopic scales, typically involving dimensions in the micrometer to nanometer range. This includes micromechanical systems (MEMS), microelectromechanical systems (NEMS), and related fabrication techniques such as lithography, etching, and deposition processes used to create miniaturized mechanical, optical, and electronic components. The classification encompasses both the production methods and the resulting microstructures used in sensors, actuators, and other functional micro-scale devices across diverse applications.