IPC Subgroup
G03F 1/64 characterised by the frames, e.g. structure or material thereof
Introduced: January 2012
Full Title
Originals for photomechanical production of textured or patterned surfaces, e.g. masks, photo-masks or reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof > Pellicles or pellicle assemblies, e.g. having membrane on support frame; Preparation thereof > characterised by the frames, e.g. structure or material thereof
Classification Context
- Section:
- PHYSICS
- Class:
- PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- Subclass:
- PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR