using physical deposition, e.g. vacuum deposition or sputtering

Full Title

Formation of materials, e.g. in the shape of layers or pillars > of semiconductor materials > using physical deposition, e.g. vacuum deposition or sputtering

Classification Context

Section:

ELECTRICITY

Class:

SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR

Subclass:

GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS