characterised by an annealing step, e.g. for activation of dopants

Full Title

Ion implantation into wafers, substrates or parts of devices > into semiconductor materials, e.g. for doping > characterised by an annealing step, e.g. for activation of dopants

Classification Context

Section:

ELECTRICITY

Class:

SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR

Subclass:

GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS