into semiconductor materials, e.g. for doping

Full Title

Ion implantation into wafers, substrates or parts of devices > into semiconductor materials, e.g. for doping

Classification Context

Section:

ELECTRICITY

Class:

SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR

Subclass:

GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS

Child Classifications

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• H10P 30/22 using masks
• H10P 30/28 characterised by an annealing step, e.g. for activation of dopants