Diffusion of dopants within, into or out of semiconductor bodies or layers

Full Title

Diffusion of dopants within, into, or out of wafers, substrates or parts of devices > Diffusion of dopants within, into or out of semiconductor bodies or layers

Classification Context

Section:

ELECTRICITY

Class:

SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR

Subclass:

GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS

Child Classifications

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• H10P 32/12 between a solid phase and a gaseous phase
• H10P 32/14 within a single semiconductor body or layer in a solid phase; between different semiconductor bodies or layers, both in a solid phase
• H10P 32/16 between a solid phase and a liquid phase