within a single semiconductor body or layer in a solid phase; between different semiconductor bodies or layers, both in a solid phase

Full Title

Diffusion of dopants within, into, or out of wafers, substrates or parts of devices > Diffusion of dopants within, into or out of semiconductor bodies or layers > within a single semiconductor body or layer in a solid phase; between different semiconductor bodies or layers, both in a solid phase

Classification Context

Section:

ELECTRICITY

Class:

SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR

Subclass:

GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS