with high-energy radiation

Full Title

Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices > with high-energy radiation

Classification Context

Section:

ELECTRICITY

Class:

SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR

Subclass:

GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS

Child Classifications

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• H10P 34/42 with electromagnetic radiation, e.g. laser annealing