with electromagnetic radiation, e.g. laser annealing

Full Title

Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices > with high-energy radiation > with electromagnetic radiation, e.g. laser annealing

Classification Context

Section:

ELECTRICITY

Class:

SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR

Subclass:

GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS