Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning

Full Title

Manufacture or treatment of microstructural devices or systems > in or on a substrate > Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning

7 direct subcodes

Child Classifications

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B81C 2201/0102 Surface micromachining
B81C 2201/0111 Bulk micromachining
B81C 2201/0118 Processes for the planarization of structures
B81C 2201/0128 Processes for removing material
B81C 2201/0147 Film patterning
B81C 2201/0156 Lithographic techniques
B81C 2201/016 Passivation

Top Applicants

Top 10 applicants by patent filingsfor class B81, 2013–2023, worldwide · Source: EPO PATSTAT

ROBERT BOSCH DE 1,976
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY TW 788
INFINEON TECHNOLOGIES DE 759
CEA (COMMISSARIAT A L'ENERGIE ATOMIQUE) FR 555
STMICROELECTRONICS IT 526
INVENSENSE US 430
MURATA MANUFACTURING COMPANY JP 418
SEIKO EPSON CORPORATION 338
CHINESE ACADEMY OF SCIENCES 338
FRAUNHOFER DE 297