CPC Subgroup
C23C 14/5873 Full Title
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material > After-treatment
1 direct subcode
Child Classifications
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C23C 14/5873 Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material > After-treatment
1 direct subcode
Navigate with arrow keys, Enter to open