After-treatment

Full Title

Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material > After-treatment

Child Classifications

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• C23C 14/5806
• C23C 14/5826
• C23C 14/584
• C23C 14/5846
• C23C 14/5873
• C23C 14/5886
• C23C 14/5893