CPC Subgroup
C23C 16/30 Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
Full Title
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes (reactive sputtering or vacuum evaporation C23C14/00) > characterised by the deposition of inorganic material, other than metallic material > Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
9 direct subcodes
Child Classifications
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- C23C 16/32 Carbides
- C23C 16/34 Nitrides
- C23C 16/36 Carbonitrides
- C23C 16/38 Borides
- C23C 16/40 Oxides
- C23C 16/42 Silicides
Top Applicants
Top 10 applicants by patent filingsfor class C23, 2013–2023, worldwide · Source: EPO PATSTAT
- APPLIED MATERIALS US 10,596
- TOKYO ELECTRON JP 5,229
- LAM RESEARCH CORPORATION US 3,622
- NIPPON STEEL CORPORATION JP 3,171
- JFE STEEL JP 3,128
- ASM IP HOLDING NL 2,722
- ARCELORMITTAL LU 2,481
- TOKYO ELECTRON 2,359
- APPLIED MATERIALS 2,284
- CHINESE ACADEMY OF SCIENCES 2,110