CPC Subgroup
C23C 16/30 Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
Full Title
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes (reactive sputtering or vacuum evaporation C23C14/00) > characterised by the deposition of inorganic material, other than metallic material > Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
9 direct subcodes
Child Classifications
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- C23C 16/32 Carbides
- C23C 16/34 Nitrides
- C23C 16/36 Carbonitrides
- C23C 16/38 Borides
- C23C 16/40 Oxides
- C23C 16/42 Silicides