CPC Subgroup
C30B 23/02 Epitaxial-layer growth
Full Title
Single-crystal growth by condensing evaporated or sublimed materials > Epitaxial-layer growth
4 direct subcodes
Child Classifications
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- C30B 23/04 Pattern deposit, e.g. by using masks
- C30B 23/06 Heating of the deposition chamber, the substrate or the materials to be evaporated
- C30B 23/08 by condensing ionised vapours (by reactive sputtering C30B25/06)