DIFF Subgroup
C30B 23/02 Epitaxial-layer growth
Introduced: January 1980
Full Title
Single-crystal growth by condensing evaporated or sublimed materials > Epitaxial-layer growth
Of 4 combined children, 3 exist in both systems.
1 codes are CPC-only extensions.
2 shared codes have differing titles between IPC and CPC.
IPC defines codes here since 1980.
Child Classifications
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- C30B 23/06 Heating of the deposition chamber, the substrate or the materials to be evaporated since 1980 +2 CPC IPC+CPC Available in IPC and CPC
- C30B 23/08 by condensing ionised vapours (by reactive sputtering C30B25/06) since 1980 IPC+CPC Available in IPC and CPC