Epitaxial-layer growth

Full Title

Single-crystal growth by condensing evaporated or sublimed materials > Epitaxial-layer growth

Classification Context

Section:

CHEMISTRY; METALLURGY

Class:

CRYSTAL GROWTH

Subclass:

SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR

Child Classifications

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• C30B 23/04 Pattern deposit, e.g. by using masks
• C30B 23/06 Heating of the deposition chamber, the substrate, or the materials to be evaporated
• C30B 23/08 by condensing ionised vapours