IPC Subgroup
C30B 23/02 Epitaxial-layer growth
Introduced: January 1980
Last revised: January 2006
Full Title
Single-crystal growth by condensing evaporated or sublimed materials > Epitaxial-layer growth
Classification Context
- Section:
- CHEMISTRY; METALLURGY
- Class:
- CRYSTAL GROWTH
- Subclass:
- SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
3 direct subcodes
Child Classifications
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- C30B 23/04 Pattern deposit, e.g. by using masks
- C30B 23/06 Heating of the deposition chamber, the substrate, or the materials to be evaporated
- C30B 23/08 by condensing ionised vapours