CPC Subgroup
C30B 25/12 Substrate holders or susceptors
Full Title
Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth > Epitaxial-layer growth > Substrate holders or susceptors
C30B 25/12 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth > Epitaxial-layer growth > Substrate holders or susceptors