CPC Subgroup
C30B 25/02 Epitaxial-layer growth
Full Title
Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth > Epitaxial-layer growth
10 direct subcodes
Child Classifications
Navigate with arrow keys, Enter to open
- C30B 25/04 Pattern deposit, e.g. by using masks
- C30B 25/06 by reactive sputtering
- C30B 25/08 Reaction chambers; Selection of materials therefor
- C30B 25/10 Heating of the reaction chamber or the substrate
- C30B 25/12 Substrate holders or susceptors
- C30B 25/14 Feed and outlet means for the gases; Modifying the flow of the reactive gases
- C30B 25/16 Controlling or regulating (controlling or regulating in general G05)
- C30B 25/18 characterised by the substrate
- C30B 25/22 Sandwich processes