CPC Subgroup
C30B 25/02 Epitaxial-layer growth
Full Title
Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth > Epitaxial-layer growth
Filing statistics
CPC C30B 25/02 belongs to the parent subclass C30B, which recorded 47,784 patent applications worldwide between 2013 and 2023. Annual filings grew from 3,425 in 2013 to 5,586 in 2023 (+63%), peaking at 5,757 applications in 2022. The most active applicants in class C30 are CHINESE ACADEMY OF SCIENCES (1,052 applications), SUMCO CORPORATION (881 applications) and APPLIED MATERIALS (871 applications).
Source: EPO PATSTAT, worldwide filings
10 direct subcodes
Child Classifications
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- C30B 25/04 Pattern deposit, e.g. by using masks
- C30B 25/06 by reactive sputtering
- C30B 25/08 Reaction chambers; Selection of materials therefor
- C30B 25/10 Heating of the reaction chamber or the substrate
- C30B 25/12 Substrate holders or susceptors
- C30B 25/14 Feed and outlet means for the gases; Modifying the flow of the reactive gases
- C30B 25/16 Controlling or regulating (controlling or regulating in general G05)
- C30B 25/18 characterised by the substrate
- C30B 25/22 Sandwich processes
Top Applicants
Top 10 applicants by patent filingsfor class C30, 2013–2023, worldwide · Source: EPO PATSTAT
- CHINESE ACADEMY OF SCIENCES 1,052
- SUMCO CORPORATION JP 881
- APPLIED MATERIALS US 871
- SUMITOMO ELECTRIC INDUSTRIES JP 682
- SHIN ETSU HANDOTAI COMPANY JP 649
- SHIN-ETSU CHEMICAL COMPANY JP 506
- SUMCO CORPORATION 500
- SILTRONIC DE 491
- GLOBALWAFERS COMPANY TW 458
- NGK INSULATORS JP 379