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PCE
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DIFF Subgroup
C30B 25/12

Substrate holders or susceptors

Introduced: January 1980

Full Title

Full titles differ between systems:

IPC:

Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth > Epitaxial-layer growth > Substrate holders or susceptors

CPC:

Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth > Epitaxial-layer growth > Substrate holders or susceptors

No child classifications to compare. This is a leaf node in both IPC and CPC.