CPC Main Group
C30B 31/00 Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
4 direct subcodes
Child Classifications
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- C30B 31/02 by contacting with diffusion materials in the solid state
- C30B 31/04 by contacting with diffusion materials in the liquid state
- C30B 31/06 by contacting with diffusion material in the gaseous state
- C30B 31/20 Doping by irradiation with electromagnetic waves or by particle radiation