Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor

Child Classifications

Navigate with arrow keys, Enter to open

• C30B 31/02 by contacting with diffusion materials in the solid state
• C30B 31/04 by contacting with diffusion materials in the liquid state
• C30B 31/06 by contacting with diffusion material in the gaseous state
• C30B 31/20 Doping by irradiation with electromagnetic waves or by particle radiation