CPC Subgroup
C30B 31/06 by contacting with diffusion material in the gaseous state
Full Title
Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor > by contacting with diffusion material in the gaseous state
6 direct subcodes
Child Classifications
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- C30B 31/08 the diffusion materials being a compound of the elements to be diffused
- C30B 31/10 Reaction chambers; Selection of materials therefor
- C30B 31/12 Heating of the reaction chamber
- C30B 31/14 Substrate holders or susceptors
- C30B 31/16 Feed and outlet means for the gases; Modifying the flow of the gases
- C30B 31/18 Controlling or regulating