by contacting with diffusion material in the gaseous state

Full Title

Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor > by contacting with diffusion material in the gaseous state

Child Classifications

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• C30B 31/08 the diffusion materials being a compound of the elements to be diffused
• C30B 31/10 Reaction chambers; Selection of materials therefor
• C30B 31/12 Heating of the reaction chamber
• C30B 31/14 Substrate holders or susceptors
• C30B 31/16 Feed and outlet means for the gases; Modifying the flow of the gases
• C30B 31/18 Controlling or regulating