CPC Subgroup
C30B 31/20 Doping by irradiation with electromagnetic waves or by particle radiation
Full Title
Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor > Doping by irradiation with electromagnetic waves or by particle radiation
1 direct subcode
Child Classifications
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- C30B 31/22 by ion-implantation