Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices

Child Classifications

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• G01Q 30/02 Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
• G01Q 30/04 Display or data processing devices
• G01Q 30/08 Means for establishing or regulating a desired environmental condition within a sample chamber
• G01Q 30/18 Means for protecting or isolating the interior of a sample chamber from external environmental conditions or influences, e.g. vibrations or electromagnetic fields
• G01Q 30/20 Sample handling devices or methods