CPC Subgroup
G01Q 60/38 Probes, their manufacture, or their related instrumentation, e.g. holders
Full Title
Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof > AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes > Probes, their manufacture, or their related instrumentation, e.g. holders
2 direct subcodes
Child Classifications
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- G01Q 60/40 Conductive probes
- G01Q 60/42 Functionalisation