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PCE
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CPC Subgroup
G01Q 60/46

SCM [Scanning Capacitance Microscopy] or apparatus therefor, e.g. SCM probes

Full Title

Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof > SCM [Scanning Capacitance Microscopy] or apparatus therefor, e.g. SCM probes

1 direct subcode

Child Classifications

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  • G01Q 60/48 Probes, their manufacture, or their related instrumentation, e.g. holders