IPC Subgroup
G01Q 60/46 SCM [Scanning Capacitance Microscopy] or apparatus therefor, e.g. SCM probes
Introduced: January 2010
Full Title
Particular types of SPM [Scanning-Probe Microscopy] or apparatus therefor; Essential components thereof > SCM [Scanning Capacitance Microscopy] or apparatus therefor, e.g. SCM probes
Classification Context
- Section:
- PHYSICS
- Class:
- MEASURING; TESTING
- Subclass:
- SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING-PROBE MICROSCOPY [SPM]
1 direct subcode
Child Classifications
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- G01Q 60/48 Probes, their manufacture or their related instrumentation, e.g. holders