Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof

Full Title

Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof > Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof

Child Classifications

Navigate with arrow keys, Enter to open

• G03F 1/64 characterised by the frames, e.g. structure or material, including bonding means therefor